Echuan Hydraulic
Echuan Hydraulic Machinery Co., Ltd.
No. 53 Shuikou Avenue, Huizhou, Guangdong, China
Tel +86-752-2399772 · WhatsApp +86-13422935851
[email protected] · www.echuan-hydraulic.com
Product Data Sheet

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Product Description

CKD TPR4-05-A100T-X0009 Flow Splitter

The CKD TPR4-05-A100T-X0009 is a high-performance PARECT pressure control flow splitter engineered for precise gas flow management in semiconductor manufacturing. Manufactured in Japan by CKD Corporation, this advanced unit features a comprehensive interface including a CN1 connector, Air In, Gas In, and a dedicated Monitor port, alongside clear Run and Alarm status indicators for easy operational monitoring. It is designed for maximum reliability and contains a critical preventive maintenance component, the EV UNIT (Model: 2L95-050041-1 / TPR2-EV-X1). To ensure continuous, optimal performance and prevent equipment downtime, this EV UNIT must be proactively replaced after processing 750,000 wafers or three years from the date of delivery, whichever comes first.

Technical Specifications:

  • Brand/Manufacturer: CKD Corporation

  • Model Number: TPR4-05-A100T-X0009 (Part No. 2L80-001427-12)

  • Product Type: PARECT Pressure Control Flow Splitter

  • Interface & Ports: CN1 Connector, Air In, Gas In, Monitor Port

  • Status Indicators: Run, Alarm

  • Maintenance Component: EV-UNIT: 2L95-050041-1 (TPR2-EV-X1)

  • Maintenance Interval: Replace after 750,000 wafers processed or 3 years from delivery

  • Country of Origin: Made in Japan

CKD TPR4-05-A100T-X0009 Flow Splitter Description

CKD TPR4-05-A100T-X0009 Flow Splitter

Shop the genuine CKD TPR4-05-A100T-X0009 PARECT Pressure Control Flow Splitter. This high-precision, Japanese-made valve features Air/Gas inputs, a monitor port, and Run/Alarm indicators, making it ideal for reliable semiconductor wafer processing equipment.

BrandCKD
ModelTPR4-05-A100T-X0009
Part No.1034716366928
CategoryOther products
Linkhttps://www.echuan-hydraulic.com/product/ckd-tpr4-05-a100t-x0009-flow-splitter
Request a quote: [email protected] · WhatsApp +86-13422935851 · Tel +86-752-2399772
All brand names and model numbers are the property of their respective manufacturers and are used for identification only. Pictures are for reference; confirm specifications before ordering.