Product Description

Brooks Instrument 5850E Mass Flow Controller

The Brooks Instrument 5850E Series Mass Flow Controller (MFC) is a high-performance device engineered for precise and repeatable control of gas flow in a wide range of applications. Known for its reliability and long-term stability, the 5850E features a robust, all-metal construction and a proven thermal sensor design. This particular unit is factory-configured for Ethylene (C2H4) gas with a full-scale flow rate of 200 sccm. Its analog control interface allows for seamless integration into existing control systems, making it an ideal choice for semiconductor manufacturing, chemical processing, and research environments where accurate gas delivery is critical.

Technical Specifications:

  • Brand: Brooks Instrument

  • Model: 5850E

  • Gas Service: C2H4 (Ethylene)

  • Full Scale Flow Rate: 200 sccm

  • Reference Temperature: 0°C

  • Input Pressure (Pin): 1 kg/cm²

  • Output Pressure (Pout): 10⁻³ torr

  • Maximum Pressure Rating: 1500 psig (100 bar)

  • Control Interface: Analog (+/- 15 Vdc)

Brooks Instrument 5850E Mass Flow Controller Description

Brooks Instrument 5850E Mass Flow Controller

Shop the reliable Brooks Instrument 5850E Mass Flow Controller, configured for 200 sccm of Ethylene (C2H4). Features a durable all-metal design and analog interface for precise gas flow control.