The HORIBA STEC S500-AR111 is a high-precision mass flow device engineered for accurate and stable control of gas flow. Specifically calibrated for Argon (Ar) gas, this model provides a full-scale flow rate of 1 SLM (Standard Liter per Minute). With an exceptional accuracy of ±1.0% of the full scale, the S500 series is ideal for demanding applications in semiconductor manufacturing, research, and other industrial processes requiring meticulous gas management. Operating on a +15V power supply, this device ensures reliable performance and repeatability for critical process control.