Product Description
Horiba SEC-E60
The Horiba SEC-E60 is a high-performance digital mass flow controller designed for precise and stable control of gas flow in a wide range of applications. Part of the esteemed SEC-E series, this model combines a compact design with advanced sensor technology to deliver exceptional accuracy and fast response times. Its robust construction and reliability make it an ideal choice for demanding environments, including semiconductor manufacturing, research and development, and various industrial processes where accurate gas management is critical. The SEC-E60 ensures repeatable and stable performance, contributing to improved process yields and quality.
Technical Specifications:
- Full Scale Flow Rate (N2 equivalent): Available in various ranges, please specify when ordering
- Control Range: 2% to 100% of Full Scale
- Accuracy: ±1.0% S.P. (Set Point)
- Response Time: ≤ 1 second (T98)
- Input/Output Signal: 0-5 VDC Analog
- Operating Temperature: 5 to 50 °C (41 to 122 °F)
- Fittings: Typically 1/4″ Swagelok or VCR compatible

Horiba SEC-E60
Discover the Horiba SEC-E60, a high-precision digital mass flow controller (MFC) offering stable and rapid gas flow control for semiconductor and industrial applications. Ensures accuracy and reliability.










