The MKS 180A01324CR34M14 is a high-performance thermal mass flow controller engineered for precise gas flow measurement and control in demanding vacuum and semiconductor applications. Part of the robust MKS 180A series, this device is factory-calibrated for Nitrogen (N2) gas with a full-scale flow capacity of 20,000 sccm. It features a PROFIBUS DP digital interface alongside a standard 9-pin power/I-O connector, ensuring seamless integration into modern industrial control networks. Designed for high-purity environments, it utilizes secure VCR process connections and is meticulously sealed inside a clean room environment. Each unit is CE marked and comes supplied with a comprehensive Certificate of Conformance, guaranteeing accuracy and reliability right out of the box.