Product Description
KOFLOC 3660SH Mass Flow Controller
The KOFLOC Model 3660SH is a high-performance, compact mass flow controller engineered for precise and stable control of gas flow rates. Renowned for its reliability and rapid response, this analog controller is an industry standard for a wide range of applications, including semiconductor manufacturing, research and development, and various industrial processes. Manufactured in Japan, the 3660SH series ensures superior quality and durability. This specific model is factory-calibrated for Oxygen (O2) with a full-scale flow rate of 20 SCCM, providing accurate and repeatable results for your critical gas delivery systems.
Technical Specifications:
- Model: 3660SH
- Controlled Gas: O2 (Oxygen)
- Full-Scale Flow Rate: 20 SCCM (Standard Cubic Centimeters per Minute)
- Standard Conditions: 20°C, 1 atm
- Power Supply: ±15 VDC
- Connection Interface: 9-pin D-sub
- Compliance: RoHS, CE
- Country of Origin: Japan

KOFLOC 3660SH Mass Flow Controller
Discover the KOFLOC 3660SH, a high-precision mass flow controller for O2 gas, delivering a stable 20 SCCM flow rate. Ideal for research and industrial applications requiring accurate gas control. Made in Japan, CE and RoHS compliant.









