The MKS 1179BX53CR14VSPC1 is a high-performance Mass-Flo® Controller designed for precise and repeatable control of gas flow in a variety of applications. This specific model is factory-configured for Silane (SiH4) gas service, offering a full-scale flow range of 2000 sccm. It is constructed with durable Viton seals for compatibility and reliability. As a complete unit, it includes the necessary controller electronics and comes with its original calibration documentation, ensuring accuracy and immediate usability for demanding processes in semiconductor manufacturing, research, and industrial environments.