Product Description

CKD GAMD402-X0852-03Y

The CKD GAMD402-X0852-03Y is a compact, high-efficiency gas abatement module, also known as a dry chemical filter. It is designed for point-of-use installation in semiconductor, FPD, and other industrial manufacturing processes. This module effectively removes harmful and corrosive by-product gases from vacuum pump exhaust lines, protecting the pump, downstream components, and the environment. Operating passively through a chemical reaction, it requires no external power or utilities. The GAMD402 series is engineered for easy installation and features a user-friendly cartridge system for simple maintenance and replacement.

Technical Specifications:

  • Series: GAMD402
  • Type: Dry Chemical Gas Abatement Module
  • Operating Fluid: Process Exhaust Gas
  • Port Size: Rc 3/8
  • Operating Pressure Range: -101 kPa to 10 kPa
  • Operating Temperature Range: 10 to 40°C
  • Maximum Flow Rate: 400 L/min (ANR)
  • Body Material: Aluminum
  • Special Specification: Model includes -X0852-03Y custom configuration

CKD GAMD402-X0852-03Y

Model:CKD GAMD402-X0852-03Y