Product Description
CKD GAMD402-X0852-03Y
The CKD GAMD402-X0852-03Y is a compact, high-efficiency gas abatement module, also known as a dry chemical filter. It is designed for point-of-use installation in semiconductor, FPD, and other industrial manufacturing processes. This module effectively removes harmful and corrosive by-product gases from vacuum pump exhaust lines, protecting the pump, downstream components, and the environment. Operating passively through a chemical reaction, it requires no external power or utilities. The GAMD402 series is engineered for easy installation and features a user-friendly cartridge system for simple maintenance and replacement.
Technical Specifications:
- Series: GAMD402
- Type: Dry Chemical Gas Abatement Module
- Operating Fluid: Process Exhaust Gas
- Port Size: Rc 3/8
- Operating Pressure Range: -101 kPa to 10 kPa
- Operating Temperature Range: 10 to 40°C
- Maximum Flow Rate: 400 L/min (ANR)
- Body Material: Aluminum
- Special Specification: Model includes -X0852-03Y custom configuration






CKD GAMD402-X0852-03Y
Model:CKD GAMD402-X0852-03Y




