Product Description
HORIBASTEC LF-A40M-A-EVD Liquid Mass Flow Controller
The HORIBASTEC LF-A40M-A-EVD is a high-precision industrial liquid mass flow controller specifically engineered for TEOS (Tetraethyl orthosilicate) applications. Manufactured in Japan, this reliable instrument delivers exceptional flow control accuracy with a specified flow rate of 4g/min and operates optimally within a temperature range of 15 to 45°C. The unit features standard 4CRF-2CRF fittings for secure and leak-free integration into existing semiconductor manufacturing equipment or industrial fluid delivery systems. For advanced calibration and system tuning, it comes equipped with accessible adjustment controls for Zero, Gain, and Response, alongside a Delay Function dip switch. Furthermore, it incorporates an integrated COPAL JAPAN F25JR DC brushless cooling fan to maintain optimal operating temperatures, ensuring consistent performance, reliability, and long-term stability in demanding environments.
Technical Specifications:
- Brand: HORIBASTEC
- Model: LF-A40M-A-EVD
- Target Liquid: TEOS (Tetraethyl orthosilicate)
- Flow Rate: 4 g/min
- Operating Temperature: 15 – 45°C
- Fittings: 4CRF-2CRF
- Adjustment Controls: Zero, Gain, Response, and Delay Function dip switch
- Cooling System: COPAL JAPAN F25JR DC Brushless Fan
- Country of Origin: Made in Japan

HORIBASTEC LF-A40M-A-EVD Liquid Mass Flow Controller
Enhance your semiconductor manufacturing processes with the HORIBASTEC LF-A40M-A-EVD Liquid Mass Flow Controller. Specifically designed for precise TEOS delivery, this Japanese-made industrial controller features a reliable 4g/min flow rate, standard 4CRF-2CRF fittings, and advanced tuning controls to ensure optimal fluid management and long-lasting stability.





